Akira Sumitani

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
- Patent number 8,804,902
- Issue date Aug 12, 2014
- Gigaphoton Inc.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet light source device and method for generating e...
- Patent number 8,710,475
- Issue date Apr 29, 2014
- Gigaphoton Inc.
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,698,116
- Issue date Apr 15, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,536,551
- Issue date Sep 17, 2013
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,507,883
- Issue date Aug 13, 2013
- Gigaphoton Inc.
- Akira Endo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
- Patent number 8,492,738
- Issue date Jul 23, 2013
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,481,984
- Issue date Jul 9, 2013
- Gigaphoton Inc.
- Masato Moriya
Information Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
- Patent number 8,477,412
- Issue date Jul 2, 2013
- Gigaphoton Inc.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet light source device and method for producing ex...
- Patent number 8,471,226
- Issue date Jun 25, 2013
- Gigaphoton Inc.
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,354,657
- Issue date Jan 15, 2013
- Gigaphoton Inc.
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,294,129
- Issue date Oct 23, 2012
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
- Patent number 8,288,743
- Issue date Oct 16, 2012
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for cleaning optical element of EUV light source device and...
- Patent number 8,256,441
- Issue date Sep 4, 2012
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,173,984
- Issue date May 8, 2012
- Komatsu Ltd.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,928,418
- Issue date Apr 19, 2011
- Gigahoton Inc.
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,923,705
- Issue date Apr 12, 2011
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,915,600
- Issue date Mar 29, 2011
- Komatsu Ltd.
- Yoshifumi Ueno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,880,153
- Issue date Feb 1, 2011
- Komatsu Ltd.
- Takashi Suganuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,683,355
- Issue date Mar 23, 2010
- Komatsu Ltd.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Excimer laser device and gas for excimer laser
- Patent number 7,006,548
- Issue date Feb 28, 2006
- Komatsu Ltd.
- Katsutomo Terashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge electrode and discharge electrode manufacturing method
- Patent number 6,810,061
- Issue date Oct 26, 2004
- Komatsu Ltd.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet laser apparatus and gas for ultraviolet laser
- Patent number 6,496,527
- Issue date Dec 17, 2002
- Komatsu, Ltd.
- Katsutomo Terashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for continuously draw-molding fiber reinforced...
- Patent number 5,811,051
- Issue date Sep 22, 1998
- Komatsu Ltd.
- Masao Kikuchi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD FOR GENERATING E...
- Publication number 20130284949
- Publication date Oct 31, 2013
- Hiroshi KOMORI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20130240762
- Publication date Sep 19, 2013
- GIGAPHOTON INC.
- Masato MORIYA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...
- Publication number 20130221247
- Publication date Aug 29, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND...
- Publication number 20120298134
- Publication date Nov 29, 2012
- GIGAPHOTON INC.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...
- Publication number 20120217414
- Publication date Aug 30, 2012
- GIGAPHOTON INC.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20110180734
- Publication date Jul 28, 2011
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20110163247
- Publication date Jul 7, 2011
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD FOR PRODUCING EX...
- Publication number 20110101863
- Publication date May 5, 2011
- GIGAPHOTON INC.
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20100176310
- Publication date Jul 15, 2010
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source apparatus
- Publication number 20100171049
- Publication date Jul 8, 2010
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100090132
- Publication date Apr 15, 2010
- Akira ENDO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for cleaning optical element of EUV light source device and...
- Publication number 20100025231
- Publication date Feb 4, 2010
- Komatsu Ltd.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20090314967
- Publication date Dec 24, 2009
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...
- Publication number 20090261242
- Publication date Oct 22, 2009
- GIGAPHOTON INC.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090261277
- Publication date Oct 22, 2009
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20080210889
- Publication date Sep 4, 2008
- Takashi Suganuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Collector mirror exchanging apparatus and method for extreme ultrav...
- Publication number 20080104828
- Publication date May 8, 2008
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20080087840
- Publication date Apr 17, 2008
- Komatsu Ltd.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20080073598
- Publication date Mar 27, 2008
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Discharge electrode and discharge electrode manufacturing method
- Publication number 20030042436
- Publication date Mar 6, 2003
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS

Akira Sumitani

Person

Patents Grantslast 30 patents

Collector mirror exchanging apparatus and method for extreme ultrav...

Extreme ultraviolet light source device and method for generating e...

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

Apparatus for and method of withdrawing ions in EUV light productio...

Extreme ultra violet light source apparatus

Collector mirror exchanging apparatus and method for extreme ultrav...

Extreme ultraviolet light source device and method for producing ex...

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

Apparatus for and method of withdrawing ions in EUV light productio...

Method for cleaning optical element of EUV light source device and...

Extreme ultraviolet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Excimer laser device and gas for excimer laser

Discharge electrode and discharge electrode manufacturing method

Ultraviolet laser apparatus and gas for ultraviolet laser

Method and apparatus for continuously draw-molding fiber reinforced...

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD FOR GENERATING E...

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...

METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND...

APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND METHOD FOR PRODUCING EX...

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

Method for cleaning optical element of EUV light source device and...

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Collector mirror exchanging apparatus and method for extreme ultrav...

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

Extreme ultra violet light source apparatus

Discharge electrode and discharge electrode manufacturing method