Akira Suzuki

Follow

Person

Sakai-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming film by plasma
- Patent number 6,770,332
- Issue date Aug 3, 2004
- Tokyo Electron Limited
- Risa Nakase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having fluorine-added carbon dielectric film a...
- Patent number 6,479,897
- Issue date Nov 12, 2002
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having fluorine-added carbon dielectric film a...
- Patent number 6,337,290
- Issue date Jan 8, 2002
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming method and apparatus and plasma processing appa...
- Patent number 5,531,834
- Issue date Jul 2, 1996
- Tokyo Electron Kabushiki Kaisha
- Shuichi Ishizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus using vertical gas inlets one on top of...
- Patent number 5,522,934
- Issue date Jun 4, 1996
- Tokyo Electron Limited
- Akira Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method for forming film by plasma
- Publication number 20020168483
- Publication date Nov 14, 2002
- Risa Nakase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device having fluorine-added carbon dielectric film a...
- Publication number 20020047203
- Publication date Apr 25, 2002
- TOKYO ELECTRON LIMITED
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...