Akira Tanabe

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Nirasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 9,478,387
- Issue date Oct 25, 2016
- Tokyo Electron Limited
- Yoshinobu Ooya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 8,642,478
- Issue date Feb 4, 2014
- Tokyo Electron Limited
- Yoshinobu Ooya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING PROCESSING APPARATUS
- Publication number 20220319860
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Akira NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140102638
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yoshinobu Ooya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20120214313
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Yoshinobu Ooya
- H01 - BASIC ELECTRIC ELEMENTS