Akira TANIHARA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma source and plasma processing apparatus
- Patent number 10,319,567
- Issue date Jun 11, 2019
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming insulating film and method for manufacturing sem...
- Patent number 9,640,388
- Issue date May 2, 2017
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave radiation antenna, microwave plasma source and plasma pro...
- Patent number 9,548,187
- Issue date Jan 17, 2017
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
- Publication number 20160284516
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING INSULATING FILM AND METHOD FOR MANUFACTURING SEM...
- Publication number 20160240374
- Publication date Aug 18, 2016
- TOKYO ELECTRON LIMITED
- Shigeru KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE RADIATION ANTENNA, MICROWAVE PLASMA SOURCE AND PLASMA PRO...
- Publication number 20140158302
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS