Akira Tokui

Person

Hyogo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for pretreating semiconductor substrate by photochemically r...
- Patent number 5,470,799
- Issue date Nov 28, 1995
- Mitsubishi Denki Kabushiki Kaisha
- Hiromi Itoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a thin film on surface of semiconductor substrate
- Patent number 5,407,867
- Issue date Apr 18, 1995
- Mitsubishki Denki Kabushiki Kaisha
- Masanobu Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a thin layer on a semiconductor substrate and ap...
- Patent number 5,178,682
- Issue date Jan 12, 1993
- Mitsubishi Denki Kabushiki Kaisha
- Katsuhiro Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for forming a thin film on surface of semiconductor subst...
- Patent number 5,174,881
- Issue date Dec 29, 1992
- Mitsubishi Denki Kabushiki Kaisha
- Masanobu Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a thin layer on a semiconductor substrate
- Patent number 5,028,560
- Issue date Jul 2, 1991
- Mitsubishi Denki Kabushiki Kaisha
- Katsuhiro Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and fabricating method thereof
- Patent number 4,956,310
- Issue date Sep 11, 1990
- Mitsubishi Denki Kabushiki Kaisha
- Akira Tokui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device with deep bit-line channel stopper
- Patent number 4,763,182
- Issue date Aug 9, 1988
- Mitsubishi Denki Kabushiki Kaisha
- Hiroji Ozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricting a semiconductor device
- Patent number 4,702,796
- Issue date Oct 27, 1987
- Mitsubishi Denki Kabushiki Kaisha
- Masayuki Nakajima
- H01 - BASIC ELECTRIC ELEMENTS

Akira Tokui

Person

Patents Grantslast 30 patents

Method for pretreating semiconductor substrate by photochemically r...

Method of forming a thin film on surface of semiconductor substrate

Method for forming a thin layer on a semiconductor substrate and ap...

Apparatus for forming a thin film on surface of semiconductor subst...

Method for forming a thin layer on a semiconductor substrate

Semiconductor memory device and fabricating method thereof

Semiconductor memory device with deep bit-line channel stopper

Method for fabricting a semiconductor device