Akira YASUMURO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 9,734,993
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20120325796
- Publication date Dec 27, 2012
- TOKYO ELECTRON LIMITED
- Atsushi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS