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Patents Grants
last 30 patents
Information
Patent Grant
Cyclone collector
Patent number
11,117,144
Issue date
Sep 14, 2021
Tokyo Electron Limited
Akitake Tamura
B04 - CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL...
Information
Patent Grant
Measurement device and measurement method
Patent number
10,509,029
Issue date
Dec 17, 2019
Tokyo Electron Limited
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Measurement device and measurement method
Patent number
10,222,363
Issue date
Mar 5, 2019
Tokyo Electron Limited
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Particulate measurement device
Patent number
10,139,334
Issue date
Nov 27, 2018
Tokyo Electron Limited
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing apparatus and particle adhesion preventing method
Patent number
8,950,999
Issue date
Feb 10, 2015
Tokyo Electron Limited
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Virus detection device and virus detection method
Patent number
8,911,955
Issue date
Dec 16, 2014
Tokyo Electron Limited
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Method and device for cleaning a substrate and storage medium
Patent number
8,673,086
Issue date
Mar 18, 2014
Tokyo Electron Limited
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern forming method, semiconductor device manufacturing apparatu...
Patent number
8,008,211
Issue date
Aug 30, 2011
Tokyo Electron Limited
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical CVD apparatus for forming silicon-germanium film
Patent number
7,648,895
Issue date
Jan 19, 2010
Tokyo Electron Limited
Masaki Kurokawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation apparatus and method of using the same
Patent number
7,615,163
Issue date
Nov 10, 2009
Tokyo Electron Limited
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle measuring method and particle measuring apparatus
Patent number
7,508,518
Issue date
Mar 24, 2009
Tokyo Electron Limited
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Grant
Heat-processing method for semiconductor process under a vacuum pre...
Patent number
7,211,514
Issue date
May 1, 2007
Tokyo Electron Limited
Takehiko Fujita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming silicon epitaxial layer
Patent number
7,008,881
Issue date
Mar 7, 2006
Tokyo Electron Limited
Akitake Tamura
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
CYCLONE COLLECTOR
Publication number
20210187519
Publication date
Jun 24, 2021
Tokyo Electron Limited
Akitake TAMURA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
ASEPTIC PODS AND LOAD PORTS
Publication number
20180362910
Publication date
Dec 20, 2018
Entegris, Inc,
Gregory Bores
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Application
PARTICULATE MEASUREMENT DEVICE
Publication number
20180120216
Publication date
May 3, 2018
TOKYO ELECTRON LIMITED
Akitake TAMURA
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Publication number
20170191974
Publication date
Jul 6, 2017
TOKYO ELECTRON LIMITED
Akitake TAMURA
G01 - MEASURING TESTING
Information
Patent Application
Measurement Device and Measurement Method
Publication number
20170191993
Publication date
Jul 6, 2017
TOKYO ELECTRON LIMITED
Akitake TAMURA
G01 - MEASURING TESTING
Information
Patent Application
SEALED CONTAINER AND CONVEYANCE SYSTEM
Publication number
20170137765
Publication date
May 18, 2017
TOKYO ELECTRON LIMITED
Akitake TAMURA
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Application
AUTOMATIC CULTURE SYSTEM AND AUTOMATIC CULTURE DEVICE
Publication number
20160201022
Publication date
Jul 14, 2016
TOKYO ELECTRON LIMITED
Shigenori OZAKI
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information
Patent Application
SEALED CONTAINER AND CELL TRANSFER SYSTEM
Publication number
20150217294
Publication date
Aug 6, 2015
TOKYO ELECTRON LIMITED
Akitake TAMURA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150114562
Publication date
Apr 30, 2015
TOKYO ELECTRON LIMITED
Akitake TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPECIMEN SOLUTION ASSAY DEVICE, SPECIMEN SOLUTION ASSAY METHOD, AND...
Publication number
20140073062
Publication date
Mar 13, 2014
TOKYO ELECTRON LIMITED
Akitake TAMURA
G01 - MEASURING TESTING
Information
Patent Application
VIRUS DETECTION DEVICE AND VIRUS DETECTION METHOD
Publication number
20130244226
Publication date
Sep 19, 2013
TOKYO ELECTRON LIMITED
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Application
DROPLET MOVING DEVICE, DROPLET MOVING METHOD, PLASMA SEPARATION DEV...
Publication number
20130134041
Publication date
May 30, 2013
TOKYO ELECTRON LIMITED
Akitake Tamura
B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information
Patent Application
SUBSTRATE DRYING APPARATUS AND METHOD
Publication number
20120255193
Publication date
Oct 11, 2012
TOKYO ELECTRON LIMITED
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
Publication number
20120094014
Publication date
Apr 19, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION HEAD AND FILM FORMING APPARATUS
Publication number
20120031339
Publication date
Feb 9, 2012
TOKYO ELECTRON LIMITED
Yuji Ono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPONENT FOR SEMICONDUCTOR PROCESSING APPARATUS AND MANUFACTURING...
Publication number
20110244693
Publication date
Oct 6, 2011
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR CLEANING A SUBSTRATE AND STORAGE MEDIUM
Publication number
20110155177
Publication date
Jun 30, 2011
TOKYO ELECTRON LIMITED
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATMOSPHERE CLEANING DEVICE
Publication number
20110090612
Publication date
Apr 21, 2011
TOKYO ELECTRON LIMITED
Junji Oikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOURCE GAS GENERATING DEVICE AND FILM FORMING APPARATUS
Publication number
20100154712
Publication date
Jun 24, 2010
TOKYO ELECTRON LIMITED
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PARTICLE ADHESION PREVENTING METHOD
Publication number
20100111648
Publication date
May 6, 2010
TOKYO ELECTRON LIMITED
Akitake Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND STO...
Publication number
20090206253
Publication date
Aug 20, 2009
TOKYO ELECTRON LIMITED
Misako SAITO
G01 - MEASURING TESTING
Information
Patent Application
Component for semicondutor processing apparatus and manufacturing m...
Publication number
20090194233
Publication date
Aug 6, 2009
Tokyo Electron Limited
Akitake Tamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS PURIFYING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20090183476
Publication date
Jul 23, 2009
TOKYO ELECTRON LIMITED
Kazuya Dobashi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING APPARATU...
Publication number
20090176374
Publication date
Jul 9, 2009
TOKYO ELECTRON LIMITED
Akitake TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL CVD APPPARATUS FOR FORMING SILICON-GERMANIUM FILM
Publication number
20090104760
Publication date
Apr 23, 2009
TOKYO ELECTON LIMITED
Masaki KUROKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Particle measuring method and particle measuring apparatus
Publication number
20080239283
Publication date
Oct 2, 2008
TOKYO ELECTRON LIMITED
Akitake Tamura
G01 - MEASURING TESTING
Information
Patent Application
Film formation apparatus and method of using the same
Publication number
20060137709
Publication date
Jun 29, 2006
Akitake Tamura
B08 - CLEANING
Information
Patent Application
Vertical CVD apparatus for forming silicon-germanium film
Publication number
20050181586
Publication date
Aug 18, 2005
Masaki Kurokawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat-processing method and apparatus for semiconductor process
Publication number
20050095826
Publication date
May 5, 2005
Takehiko Fujita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for forming silicon epitaxial layer
Publication number
20040175959
Publication date
Sep 9, 2004
Akitake Tamura
C30 - CRYSTAL GROWTH