Akiteru Koh

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method
- Patent number 7,473,377
- Issue date Jan 6, 2009
- Tokyo Electron Limited
- Tomoyo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 7,192,532
- Issue date Mar 20, 2007
- Tokyo Electron Limited
- Akiteru Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry-etching method
- Patent number 7,183,217
- Issue date Feb 27, 2007
- Tokyo Electron Limited
- Etsuo Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 7,179,752
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Akitaka Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing method
- Publication number 20050103748
- Publication date May 19, 2005
- TOKYO ELECTRON LIMITED
- Tomoyo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method
- Publication number 20050045588
- Publication date Mar 3, 2005
- Akiteru Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method
- Publication number 20040214445
- Publication date Oct 28, 2004
- Akitaka Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method
- Publication number 20040009667
- Publication date Jan 15, 2004
- Etsuo Iijima
- H01 - BASIC ELECTRIC ELEMENTS