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Akito Ando
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Method of forming and repairing a mask for photolithography
Patent number
5,686,207
Issue date
Nov 11, 1997
Seiko Instruments Inc.
Masayuki Suda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of electrochemical fine processing
Patent number
5,366,613
Issue date
Nov 22, 1994
Seiko Instruments Inc.
Masayuki Suda
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrochemical fine processing apparatus
Patent number
5,344,539
Issue date
Sep 6, 1994
Seiko Instruments Inc.
Masataka Shinogi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Optical fine processing apparatus
Patent number
5,288,382
Issue date
Feb 22, 1994
Seiko Instruments, Inc.
Masataka Shinogi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR