Akito HATANO

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,610,790
- Issue date Mar 21, 2023
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device including heater between substrate and...
- Patent number 11,410,863
- Issue date Aug 9, 2022
- SCREEN Holdings Co., Ltd.
- Motoyuki Shimai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,075,095
- Issue date Jul 27, 2021
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container, load port apparatus, and substrate treating ap...
- Patent number 10,910,247
- Issue date Feb 2, 2021
- SCREEN Holdings Co., Ltd.
- Kazuhiro Honsho
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,748,795
- Issue date Aug 18, 2020
- SCREEN Holdings Co., Ltd.
- Kota Sotoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,403,517
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container, load port apparatus, and substrate treating ap...
- Patent number 10,381,249
- Issue date Aug 13, 2019
- SCREEN Holdings Co., Ltd.
- Kazuhiro Honsho
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus
- Patent number 10,332,761
- Issue date Jun 25, 2019
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,297,476
- Issue date May 21, 2019
- SCREEN Holdings Co., Ltd.
- Jun Sawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,115,588
- Issue date Oct 30, 2018
- SCREEN Holdings Co., Ltd.
- Koji Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate treating methods
- Patent number 9,810,532
- Issue date Nov 7, 2017
- SCREEN Holdings Co., Ltd.
- Koji Hashimoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate container, a load port apparatus, and a substrate treatin...
- Patent number 9,576,831
- Issue date Feb 21, 2017
- SCREEN Holdings Co., Ltd.
- Akito Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,449,861
- Issue date Sep 20, 2016
- SCREEN Holdings Co., Ltd.
- Akito Hatano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210249279
- Publication date Aug 12, 2021
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190267257
- Publication date Aug 29, 2019
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20190198363
- Publication date Jun 27, 2019
- SCREEN Holdings Co., Ltd.
- Motoyuki SHIMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180151394
- Publication date May 31, 2018
- SCREEN Holdings Co., Ltd.
- Akito HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180090352
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Kota SOTOKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20170301540
- Publication date Oct 19, 2017
- SCREEN Holdings Co., Ltd.
- Koji HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...
- Publication number 20170294328
- Publication date Oct 12, 2017
- SCREEN Holdings Co., Ltd.
- Kazuhiro HONSHO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...
- Publication number 20170263479
- Publication date Sep 14, 2017
- SCREEN Holdings Co., Ltd.
- Kazuhiro HONSHO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160247697
- Publication date Aug 25, 2016
- SCREEN Holdings Co., Ltd.
- Jun SAWASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160240399
- Publication date Aug 18, 2016
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160240413
- Publication date Aug 18, 2016
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHODS
- Publication number 20160091306
- Publication date Mar 31, 2016
- SCREEN Holdings Co., Ltd.
- Koji HASHIMOTO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE CONTAINER, A LOAD PORT APPARATUS, AND A SUBSTRATE TREATIN...
- Publication number 20160071753
- Publication date Mar 10, 2016
- SCREEN Holdings Co., Ltd.
- Akito HATANO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150287624
- Publication date Oct 8, 2015
- SCREEN Holdings Co., Ltd.
- Akito Hatano
- H01 - BASIC ELECTRIC ELEMENTS

Akito HATANO

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing device including heater between substrate and...

Substrate processing apparatus

Substrate container, load port apparatus, and substrate treating ap...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Substrate container, load port apparatus, and substrate treating ap...

Substrate processing apparatus

Substrate processing apparatus

Substrate treating apparatus and substrate treating method

Substrate treating apparatus and substrate treating methods

Substrate container, a load port apparatus, and a substrate treatin...

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...

SUBSTRATE CONTAINER, LOAD PORT APPARATUS, AND SUBSTRATE TREATING AP...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHODS

SUBSTRATE CONTAINER, A LOAD PORT APPARATUS, AND A SUBSTRATE TREATIN...

SUBSTRATE PROCESSING APPARATUS