Akito Hirano

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,840,094
- Issue date Nov 17, 2020
- Kokusai Electric Corporation
- Kiyohiko Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,192,735
- Issue date Jan 29, 2019
- Kokusai Electric Corporation
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device including silicon nitr...
- Patent number 10,049,870
- Issue date Aug 14, 2018
- Kokusai Electric Corporation
- Akito Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,754,780
- Issue date Sep 5, 2017
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,236,242
- Issue date Jan 12, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,334,215
- Issue date Dec 18, 2012
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and manufacturing method of semicond...
- Patent number 8,178,445
- Issue date May 15, 2012
- Hitachi Kokusai Electric Inc.
- Tadashi Horie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,133,820
- Issue date Mar 13, 2012
- Hitachi Kokusai Electric Inc.
- Akito Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,066,894
- Issue date Nov 29, 2011
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Producing method of semiconductor device
- Patent number 7,795,156
- Issue date Sep 14, 2010
- Hitachi Kokusai Electric Inc.
- Tadashi Terasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230349065
- Publication date Nov 2, 2023
- Kokusai Electric Corporation
- Takahiro MIYAKURA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230295837
- Publication date Sep 21, 2023
- Kokusai Electric Corporation
- Kaichiro MINAMI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190206679
- Publication date Jul 4, 2019
- Kokusai Electric Corporation
- Kiyohiko MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170338106
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-Transitory Com...
- Publication number 20160172191
- Publication date Jun 16, 2016
- Hitachi Kokusai Electric Inc.
- Akito Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160086797
- Publication date Mar 24, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130095669
- Publication date Apr 18, 2013
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20130078816
- Publication date Mar 28, 2013
- Hitachi Kokusai Electric Inc.
- Akito Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and manufacturing method of semicond...
- Publication number 20100317199
- Publication date Dec 16, 2010
- Hitachi Kokusai Electric Inc.
- Tadashi Horie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20090258506
- Publication date Oct 15, 2009
- Hitachi Kokusai Electric Inc.
- Akito Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...
- Publication number 20090233430
- Publication date Sep 17, 2009
- Hitachi-Kokusai Electric In.
- Akito HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20090169768
- Publication date Jul 2, 2009
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080138994
- Publication date Jun 12, 2008
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Producing Method of Semiconductor Device
- Publication number 20070298622
- Publication date Dec 27, 2007
- HITACHI KOKUSAI ELECTRIC INC,
- Tadashi Terasaki
- H01 - BASIC ELECTRIC ELEMENTS

Akito Hirano

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device including silicon nitr...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and manufacturing method of semicond...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Producing method of semiconductor device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Method of Manufacturing Semiconductor Device and Non-Transitory Com...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

Substrate processing apparatus and manufacturing method of semicond...

Substrate Processing Method and Substrate Processing Apparatus

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE MAN...

Substrate processing method and substrate processing apparatus

Substrate Processing Method and Substrate Processing Apparatus

Producing Method of Semiconductor Device