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Akito Kouchi

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method
    • Patent number 9,018,075
    • Issue date Apr 28, 2015
    • Hitachi High-Technologies Corporation
    • Toru Ito
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20130164911
    • Publication date Jun 27, 2013
    • Hitachi High-Technologies Corporation
    • Toru ITO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20120003838
    • Publication date Jan 5, 2012
    • Hitachi High-Technologies Corporation
    • Kazumasa Ookuma
    • H01 - BASIC ELECTRIC ELEMENTS