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Fluid control system
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Patent number 9,618,943
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Issue date Apr 11, 2017
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Horiba Stec, Co., Ltd.
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Yuki Tanaka
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G05 - CONTROLLING REGULATING
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Mass flow controller
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Patent number 8,265,795
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Issue date Sep 11, 2012
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Horiba Stec, Co., Ltd.
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Akito Takahashi
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G05 - CONTROLLING REGULATING
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Mass flow controller
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Patent number 8,056,579
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Issue date Nov 15, 2011
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Horiba Stec, Co., Ltd.
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Akito Takahashi
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G05 - CONTROLLING REGULATING
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Mass flow controller
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Patent number 7,881,829
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Issue date Feb 1, 2011
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Horiba Stec Co., Ltd.
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Yutaka Yoneda
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G05 - CONTROLLING REGULATING