Akiyoshi Hattori

Person

Handa-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer mounting table and method of manufacturing the same
- Patent number 11,398,401
- Issue date Jul 26, 2022
- NGK Insulators, Ltd.
- Yuji Akatsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding agent, aluminum nitride composite body, and manufacturing m...
- Patent number 8,475,613
- Issue date Jul 2, 2013
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Electrostatic chuck with heater and manufacturing method thereof
- Patent number 8,136,820
- Issue date Mar 20, 2012
- NGK Insulators, Ltd.
- Ikuhisa Morioka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck heater
- Patent number 8,008,602
- Issue date Aug 30, 2011
- NGK Insulators, Ltd.
- Yutaka Mori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Electrostatic chuck with heater
- Patent number 7,848,075
- Issue date Dec 7, 2010
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with heater and manufacturing method thereof
- Patent number 7,701,693
- Issue date Apr 20, 2010
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Electrostatic chuck and manufacturing method thereof
- Patent number 7,633,738
- Issue date Dec 15, 2009
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alumina sintered body
- Patent number 7,446,993
- Issue date Nov 4, 2008
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Corrosion-resistant member and producing method thereof
- Patent number 7,354,652
- Issue date Apr 8, 2008
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Aluminum nitride substrate and production method
- Patent number 7,338,723
- Issue date Mar 4, 2008
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor and a method of cleaning the same
- Patent number 7,261,780
- Issue date Aug 28, 2007
- NGK Insulators, Ltd.
- Taiji Kiku
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Joined structures of ceramics
- Patent number 7,252,872
- Issue date Aug 7, 2007
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Bonding member and electrostatic chuck
- Patent number 7,218,502
- Issue date May 15, 2007
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CERAMIC PLATE
- Publication number 20250069930
- Publication date Feb 27, 2025
- NGK Insulators, Ltd.
- Takahiro ANDO
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
COOLING PLATE AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230386882
- Publication date Nov 30, 2023
- NGK Insulators, Ltd.
- Masato MISAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTA...
- Publication number 20230298921
- Publication date Sep 21, 2023
- NGK Insulators, Ltd.
- Akiyoshi HATTORI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
WAFER MOUNTING TABLE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200219755
- Publication date Jul 9, 2020
- NGK Insulators, Ltd.
- Yuji AKATSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDED STRUCTURE AND METHOD OF PRODUCING THE SAME
- Publication number 20100000779
- Publication date Jan 7, 2010
- NGK Insulators, Ltd.
- Akiyoshi HATTORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING AGENT, ALUMINUM NITRIDE COMPOSITE BODY, AND MANUFACTURING M...
- Publication number 20090242101
- Publication date Oct 1, 2009
- NGK INSULATORS, LTD.
- Akiyoshi Hattori
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK WITH HEATER
- Publication number 20080266745
- Publication date Oct 30, 2008
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF
- Publication number 20080174930
- Publication date Jul 24, 2008
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
Electrostatic chuck and manufacturing method thereof
- Publication number 20080100985
- Publication date May 1, 2008
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck heater
- Publication number 20080047952
- Publication date Feb 28, 2008
- NGK Insulators, Ltd.
- Yutaka Mori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF
- Publication number 20080049374
- Publication date Feb 28, 2008
- NGK Insulators, Ltd.
- Ikuhisa Morioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALUMINA SINTERED BODY
- Publication number 20070223167
- Publication date Sep 27, 2007
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ALUMINUM NITRIDE BONDED BODY, AND MANUFACTURING METHOD OF THE SAME
- Publication number 20070144667
- Publication date Jun 28, 2007
- NGK Insulators, Ltd.
- Akiyoshi HATTORI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Corrosion-resistant member and producing method thereof
- Publication number 20070042203
- Publication date Feb 22, 2007
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Bonding agent, aluminum nitride composite body, and manufacturing m...
- Publication number 20060110624
- Publication date May 25, 2006
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- B32 - LAYERED PRODUCTS
Information Patent Application
Aluminum nitride substrate and production method
- Publication number 20050215415
- Publication date Sep 29, 2005
- NGK Insulators, Ltd.
- Akiyoshi Hattori
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Ceramic susceptor and a method of cleaning the same
- Publication number 20050211703
- Publication date Sep 29, 2005
- NGK Insulators, Ltd.
- Taiji Kiku
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Bonding member and electrostatic chuck
- Publication number 20040240142
- Publication date Dec 2, 2004
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Joined structures of ceramics
- Publication number 20040146737
- Publication date Jul 29, 2004
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Akiyoshi Hattori

Person

Patents Grantslast 30 patents

Wafer mounting table and method of manufacturing the same

Bonding agent, aluminum nitride composite body, and manufacturing m...

Electrostatic chuck with heater and manufacturing method thereof

Electrostatic chuck heater

Electrostatic chuck with heater

Electrostatic chuck with heater and manufacturing method thereof

Electrostatic chuck and manufacturing method thereof

Alumina sintered body

Corrosion-resistant member and producing method thereof

Aluminum nitride substrate and production method

Ceramic susceptor and a method of cleaning the same

Joined structures of ceramics

Bonding member and electrostatic chuck

Patents Applicationslast 30 patents

CERAMIC PLATE

COOLING PLATE AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTA...

WAFER MOUNTING TABLE AND METHOD OF MANUFACTURING THE SAME

BONDED STRUCTURE AND METHOD OF PRODUCING THE SAME

BONDING AGENT, ALUMINUM NITRIDE COMPOSITE BODY, AND MANUFACTURING M...

ELECTROSTATIC CHUCK WITH HEATER

ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF

Electrostatic chuck and manufacturing method thereof

Electrostatic chuck heater

ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF

ALUMINA SINTERED BODY

ALUMINUM NITRIDE BONDED BODY, AND MANUFACTURING METHOD OF THE SAME

Corrosion-resistant member and producing method thereof

Bonding agent, aluminum nitride composite body, and manufacturing m...

Aluminum nitride substrate and production method

Ceramic susceptor and a method of cleaning the same

Bonding member and electrostatic chuck

Joined structures of ceramics