Akiyoshi MITSUMORI

Person

  • Miyagi, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    TEMPERATURE ADJUSTMENT SYSTEM

    • Publication number 20210327747
    • Publication date Oct 21, 2021
    • TOKYO ELECTRON LIMITED
    • Shin Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TEMPERATURE ADJUSTMENT METHOD

    • Publication number 20210319990
    • Publication date Oct 14, 2021
    • TOKYO ELECTRON LIMITED
    • Shin Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS

    • Publication number 20210005432
    • Publication date Jan 7, 2021
    • TOKYO ELECTRON LIMITED
    • Shin YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PRECOATING METHOD

    • Publication number 20200118799
    • Publication date Apr 16, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshiyuki KIKUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TEMPERATURE CONTROL METHOD

    • Publication number 20190326102
    • Publication date Oct 24, 2019
    • TOKYO ELECTRON LIMITED
    • Akiyoshi MITSUMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TEMPERATURE ADJUSTMENT SYSTEM

    • Publication number 20190304759
    • Publication date Oct 3, 2019
    • TOKYO ELECTRON LIMITED
    • Akiyoshi MITSUMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CLEANING METHOD

    • Publication number 20190304761
    • Publication date Oct 3, 2019
    • TOKYO ELECTRON LIMITED
    • Akiyoshi MITSUMORI
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Application

    TEMPERATURE ADJUSTMENT METHOD

    • Publication number 20190304760
    • Publication date Oct 3, 2019
    • TOKYO ELECTRON LIMITED
    • Akiyoshi MITSUMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COOLING SYSTEM

    • Publication number 20190249911
    • Publication date Aug 15, 2019
    • TOKYO ELECTRON LIMITED
    • Shin Yamaguchi
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Application

    HEAT INSULATING PIPE SYSTEM AND PROCESSING SYSTEM

    • Publication number 20190242289
    • Publication date Aug 8, 2019
    • TOKYO ELECTRON LIMITED
    • Kohei Otsuki
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    FLEXIBLE PIPE AND TEMPERATURE CONTROL SYSTEM

    • Publication number 20190234534
    • Publication date Aug 1, 2019
    • TOKYO ELECTRON LIMITED
    • Kohei Otsuki
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    PROCESSING APPARATUS FOR TARGET OBJECT AND INSPECTION METHOD FOR PR...

    • Publication number 20190027345
    • Publication date Jan 24, 2019
    • TOKYO ELECTRON LIMITED
    • Akira Ishikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS

    • Publication number 20180350561
    • Publication date Dec 6, 2018
    • TOKYO ELECTRON LIMITED
    • Shin YAMAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF OPERATING ELECTROSTATIC CHUCK OF PLASMA PROCESSING APPARATUS

    • Publication number 20180350568
    • Publication date Dec 6, 2018
    • TOKYO ELECTRON LIMITED
    • Akiyoshi MITSUMORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT

    • Publication number 20180218887
    • Publication date Aug 2, 2018
    • TOKYO ELECTRON LIMITED
    • Takehiko Arita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT

    • Publication number 20180218886
    • Publication date Aug 2, 2018
    • TOKYO ELECTRON LIMITED
    • Shin Yamaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PRECOATING METHOD

    • Publication number 20170250058
    • Publication date Aug 31, 2017
    • TOKYO ELECTRON LIMITED
    • Yoshiyuki KIKUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...