Membership
Tour
Register
Log in
Akiyoshi MITSUMORI
Follow
Person
Miyagi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Temperature adjustment method
Patent number
12,068,143
Issue date
Aug 20, 2024
Tokyo Electron Limited
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature adjustment system
Patent number
11,869,799
Issue date
Jan 9, 2024
Tokyo Electron Limited
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Flexible pipe and temperature control system
Patent number
11,566,728
Issue date
Jan 31, 2023
Tokyo Electron Limited
Kohei Otsuki
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Grant
Electrostatic chuck and plasma processing apparatus
Patent number
11,476,095
Issue date
Oct 18, 2022
Tokyo Electron Limited
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus for processing target object
Patent number
11,404,251
Issue date
Aug 2, 2022
Tokyo Electron Limited
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling system
Patent number
11,060,770
Issue date
Jul 13, 2021
Tokyo Electron Limited
Shin Yamaguchi
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Plasma processing apparatus and precoating method
Patent number
10,910,200
Issue date
Feb 2, 2021
Tokyo Electron Limited
Yoshiyuki Kikuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and plasma processing apparatus
Patent number
10,825,660
Issue date
Nov 3, 2020
Tokyo Electron Limited
Shin Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of operating electrostatic chuck of plasma processing apparatus
Patent number
10,818,480
Issue date
Oct 27, 2020
Tokyo Electron Limited
Akiyoshi Mitsumori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus for target object and inspection method for pr...
Patent number
10,796,889
Issue date
Oct 6, 2020
Tokyo Electron Limited
Akira Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat insulating pipe system and processing system
Patent number
10,787,950
Issue date
Sep 29, 2020
Tokyo Electron Limited
Kohei Otsuki
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Temperature control method
Patent number
10,665,432
Issue date
May 26, 2020
Tokyo Electron Limited
Akiyoshi Mitsumori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TEMPERATURE ADJUSTMENT SYSTEM
Publication number
20210327747
Publication date
Oct 21, 2021
TOKYO ELECTRON LIMITED
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE ADJUSTMENT METHOD
Publication number
20210319990
Publication date
Oct 14, 2021
TOKYO ELECTRON LIMITED
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS
Publication number
20210005432
Publication date
Jan 7, 2021
TOKYO ELECTRON LIMITED
Shin YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PRECOATING METHOD
Publication number
20200118799
Publication date
Apr 16, 2020
TOKYO ELECTRON LIMITED
Yoshiyuki KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE CONTROL METHOD
Publication number
20190326102
Publication date
Oct 24, 2019
TOKYO ELECTRON LIMITED
Akiyoshi MITSUMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE ADJUSTMENT SYSTEM
Publication number
20190304759
Publication date
Oct 3, 2019
TOKYO ELECTRON LIMITED
Akiyoshi MITSUMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD
Publication number
20190304761
Publication date
Oct 3, 2019
TOKYO ELECTRON LIMITED
Akiyoshi MITSUMORI
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Application
TEMPERATURE ADJUSTMENT METHOD
Publication number
20190304760
Publication date
Oct 3, 2019
TOKYO ELECTRON LIMITED
Akiyoshi MITSUMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING SYSTEM
Publication number
20190249911
Publication date
Aug 15, 2019
TOKYO ELECTRON LIMITED
Shin Yamaguchi
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
HEAT INSULATING PIPE SYSTEM AND PROCESSING SYSTEM
Publication number
20190242289
Publication date
Aug 8, 2019
TOKYO ELECTRON LIMITED
Kohei Otsuki
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
FLEXIBLE PIPE AND TEMPERATURE CONTROL SYSTEM
Publication number
20190234534
Publication date
Aug 1, 2019
TOKYO ELECTRON LIMITED
Kohei Otsuki
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
PROCESSING APPARATUS FOR TARGET OBJECT AND INSPECTION METHOD FOR PR...
Publication number
20190027345
Publication date
Jan 24, 2019
TOKYO ELECTRON LIMITED
Akira Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS
Publication number
20180350561
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Shin YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING ELECTROSTATIC CHUCK OF PLASMA PROCESSING APPARATUS
Publication number
20180350568
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Akiyoshi MITSUMORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
Publication number
20180218887
Publication date
Aug 2, 2018
TOKYO ELECTRON LIMITED
Takehiko Arita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS FOR PROCESSING TARGET OBJECT
Publication number
20180218886
Publication date
Aug 2, 2018
TOKYO ELECTRON LIMITED
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PRECOATING METHOD
Publication number
20170250058
Publication date
Aug 31, 2017
TOKYO ELECTRON LIMITED
Yoshiyuki KIKUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...