Akiyoshi Suzuki

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,910,351
- Issue date Mar 6, 2018
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus including alignment and overlay measurement
- Patent number 9,616,613
- Issue date Apr 11, 2017
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,541,825
- Issue date Jan 10, 2017
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus
- Patent number 8,085,384
- Issue date Dec 27, 2011
- Canon Kabushiki Kaisha
- Akinori Ohkubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,573,563
- Issue date Aug 11, 2009
- Canon Kabushiki Kaisha
- Kenji Yamazoe
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device manufacturing method using the apparatus
- Patent number 7,466,395
- Issue date Dec 16, 2008
- Canon Kabushiki Kaisha
- Yumiko Ohsaki
- G01 - MEASURING TESTING
Information Patent Grant
Phase measuring method and apparatus for measuring characterization...
- Patent number 7,327,467
- Issue date Feb 5, 2008
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Grant
Exposure method and apparatus
- Patent number 7,217,503
- Issue date May 15, 2007
- Canon Kabushiki Kaisha
- Kenji Saitoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and its manufacturing method, exposure, and device fabrication...
- Patent number 7,214,453
- Issue date May 8, 2007
- Canon Kabushiki Kaisha
- Kenji Yamazoe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system and exposure apparatus using the same
- Patent number 7,196,773
- Issue date Mar 27, 2007
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and method
- Patent number 7,126,667
- Issue date Oct 24, 2006
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for setting mask pattern and illumination condition
- Patent number 7,107,573
- Issue date Sep 12, 2006
- Canon Kabushiki Kaisha
- Kenji Yamazoe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometer and interferance measurement method
- Patent number 7,106,455
- Issue date Sep 12, 2006
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method
- Patent number 7,046,337
- Issue date May 16, 2006
- Canon Kabushiki Kaisha
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase measurement apparatus for measuring characterization of optic...
- Patent number 7,030,998
- Issue date Apr 18, 2006
- Canon Kabushiki Kaisha
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method
- Patent number 6,992,750
- Issue date Jan 31, 2006
- Canon Kabushiki Kaisha
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometer and interferance measurement method
- Patent number 6,842,255
- Issue date Jan 11, 2005
- Canon Kabushiki Kaisha
- Yumiko Ohsaki
- G01 - MEASURING TESTING
Information Patent Grant
Illumination system and scanning exposure apparatus using the same
- Patent number 6,762,823
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G02 - OPTICS
Information Patent Grant
Scanning exposure apparatus and device manufacturing method using t...
- Patent number 6,753,943
- Issue date Jun 22, 2004
- Canon Kabushiki Kaisha
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aligning method, aligner, and device manufacturing method
- Patent number 6,714,302
- Issue date Mar 30, 2004
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLUDING CHANGI...
- Patent number 6,654,101
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple exposure device formation
- Patent number 6,534,242
- Issue date Mar 18, 2003
- Canon Kabushiki Kaisha
- Mitsuro Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method inclu...
- Patent number 6,473,160
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system and exposure apparatus having the same
- Patent number 6,441,886
- Issue date Aug 27, 2002
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple exposure method
- Patent number 6,403,291
- Issue date Jun 11, 2002
- Canon Kabushiki Kaisha
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 6,377,337
- Issue date Apr 23, 2002
- Canon Kabushiki Kaisha
- Mitsuro Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using same
- Patent number 6,344,892
- Issue date Feb 5, 2002
- Canon Kabushiki Kaisha
- Mitsuro Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method inclu...
- Patent number 6,307,618
- Issue date Oct 23, 2001
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method including changi...
- Patent number 6,271,909
- Issue date Aug 7, 2001
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method
- Patent number 6,172,740
- Issue date Jan 9, 2001
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20170080633
- Publication date Mar 23, 2017
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD
- Publication number 20150004275
- Publication date Jan 1, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130193602
- Publication date Aug 1, 2013
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20130181365
- Publication date Jul 18, 2013
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, IMPRINT SYSTEM, AND DEVICE MANUF...
- Publication number 20130106023
- Publication date May 2, 2013
- Canon Kabushiki Kaisha
- Akiko Iimura
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070252968
- Publication date Nov 1, 2007
- Akinori Ohkubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20070146677
- Publication date Jun 28, 2007
- Akiyoshi Suzuki
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE APPARATUS
- Publication number 20070019175
- Publication date Jan 25, 2007
- Canon Kabushiki Kaisha
- Yumiko Ohsaki
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and method, measuring apparatus, and device manu...
- Publication number 20060210911
- Publication date Sep 21, 2006
- Kenji Yamazoe
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and method
- Publication number 20060158629
- Publication date Jul 20, 2006
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase measuring method and apparatus for measuring characterization...
- Publication number 20060055940
- Publication date Mar 16, 2006
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and method
- Publication number 20060012764
- Publication date Jan 19, 2006
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system and exposure apparatus using the same
- Publication number 20060012769
- Publication date Jan 19, 2006
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G02 - OPTICS
Information Patent Application
Mask and its manufacturing method, exposure, and device fabrication...
- Publication number 20040166422
- Publication date Aug 26, 2004
- Kenji Yamazoe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20040119954
- Publication date Jun 24, 2004
- Miyoko Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging method for manufacture of microdevices
- Publication number 20040080736
- Publication date Apr 29, 2004
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for setting mask pattern and illumination condition
- Publication number 20030198872
- Publication date Oct 23, 2003
- Kenji Yamazoe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase measuring method and apparatus
- Publication number 20030144819
- Publication date Jul 31, 2003
- Seiji Takeuchi
- G01 - MEASURING TESTING
Information Patent Application
Interferometer and interferance measurement method
- Publication number 20030011783
- Publication date Jan 16, 2003
- AKIYOSHI SUZUKI
- G01 - MEASURING TESTING
Information Patent Application
Interferometer and interferance measurement method
- Publication number 20020176090
- Publication date Nov 28, 2002
- Yumiko Ohsaki
- G01 - MEASURING TESTING
Information Patent Application
Exposure method and apparatus
- Publication number 20020177048
- Publication date Nov 28, 2002
- Kenji Saitoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning exposure apparatus and device manufacturing method using t...
- Publication number 20020131032
- Publication date Sep 19, 2002
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS
- Publication number 20020030802
- Publication date Mar 14, 2002
- MITSURO SUGITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, exposure apparatus, and device manufacturing method
- Publication number 20020031725
- Publication date Mar 14, 2002
- Mitsuro Sugita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNING METHOD, ALIGNER, AND DEVICE MANUFACTURING METHOD
- Publication number 20020024671
- Publication date Feb 28, 2002
- AKIYOSHI SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system and scanning exposure apparatus using the same
- Publication number 20020018197
- Publication date Feb 14, 2002
- Akiyoshi Suzuki
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME
- Publication number 20020015142
- Publication date Feb 7, 2002
- AKIYOSHI SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLU...
- Publication number 20010048512
- Publication date Dec 6, 2001
- AKIYOSHI SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging method for manufacture of microdevices
- Publication number 20010015797
- Publication date Aug 23, 2001
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus and device manufacturing method inclu...
- Publication number 20010007495
- Publication date Jul 12, 2001
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Akiyoshi Suzuki

Person

Patents Grantslast 30 patents

Imprint apparatus and article manufacturing method

Imprint apparatus including alignment and overlay measurement

Imprint apparatus and article manufacturing method

Exposure apparatus

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method using the apparatus

Phase measuring method and apparatus for measuring characterization...

Exposure method and apparatus

Mask and its manufacturing method, exposure, and device fabrication...

Illumination optical system and exposure apparatus using the same

Exposure apparatus and method

Method for setting mask pattern and illumination condition

Interferometer and interferance measurement method

Exposure apparatus and method

Phase measurement apparatus for measuring characterization of optic...

Exposure apparatus and method

Interferometer and interferance measurement method

Illumination system and scanning exposure apparatus using the same

Scanning exposure apparatus and device manufacturing method using t...

Aligning method, aligner, and device manufacturing method

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLUDING CHANGI...

Multiple exposure device formation

Projection exposure apparatus and device manufacturing method inclu...

Illumination optical system and exposure apparatus having the same

Multiple exposure method

Projection exposure apparatus

Exposure apparatus and device manufacturing method using same

Projection exposure apparatus and device manufacturing method inclu...

Exposure apparatus and device manufacturing method including changi...

Projection exposure apparatus and device manufacturing method

Patents Applicationslast 30 patents

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

MOLD

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, IMPRINT SYSTEM, AND DEVICE MANUF...

EXPOSURE APPARATUS

ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS USING THE SAME

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE APPARATUS

Exposure apparatus and method, measuring apparatus, and device manu...

Exposure apparatus and method

Phase measuring method and apparatus for measuring characterization...

Exposure apparatus and method

Illumination optical system and exposure apparatus using the same

Mask and its manufacturing method, exposure, and device fabrication...

Exposure apparatus and method

Imaging method for manufacture of microdevices

Method for setting mask pattern and illumination condition

Phase measuring method and apparatus

Interferometer and interferance measurement method

Interferometer and interferance measurement method

Exposure method and apparatus

Scanning exposure apparatus and device manufacturing method using t...

PROJECTION EXPOSURE APPARATUS

Exposure method, exposure apparatus, and device manufacturing method

ALIGNING METHOD, ALIGNER, AND DEVICE MANUFACTURING METHOD

Illumination system and scanning exposure apparatus using the same

ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME

PROJECTION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLU...

Imaging method for manufacture of microdevices

Projection exposure apparatus and device manufacturing method inclu...