Akshay HARLALKA

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Norwalk, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Lithography support cleaning with cleaning substrate having control...
- Patent number 11,953,838
- Issue date Apr 9, 2024
- ASML Holding N.V.
- Keane Michael Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING
- Publication number 20240419088
- Publication date Dec 19, 2024
- ASML NETHERLANDS B.V.
- Akshay Dipakkumar HARLALKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SUPPORT CLEANING WITH CLEANING SUBSTRATE HAVING CONTROL...
- Publication number 20220026819
- Publication date Jan 27, 2022
- ASML Holding N.V.
- Keane Michael LEVY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY