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Ala Moradian
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Beverly, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for controlling heat flow within a silicon melt using a heat...
Patent number
10,801,125
Issue date
Oct 13, 2020
Peter L. Kellerman
C30 - CRYSTAL GROWTH
Information
Patent Grant
Semiconductor workpiece temperature measurement system
Patent number
10,739,208
Issue date
Aug 11, 2020
Varian Semiconductor Equipment Associates, Inc.
Klaus Petry
G01 - MEASURING TESTING
Information
Patent Grant
Substrate handling and heating system
Patent number
10,443,934
Issue date
Oct 15, 2019
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
F26 - DRYING
Information
Patent Grant
Apparatus for controlling heat flow within a silicon melt
Patent number
10,415,151
Issue date
Sep 17, 2019
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
C30 - CRYSTAL GROWTH
Information
Patent Grant
System and method for crystalline sheet growth using a cold block a...
Patent number
9,957,636
Issue date
May 1, 2018
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
C30 - CRYSTAL GROWTH
Information
Patent Grant
Semiconductor workpiece temperature measurement system
Patent number
9,933,314
Issue date
Apr 3, 2018
Varian Semiconductor Equipment Associates, Inc.
Klaus Petry
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for substrate heating during transport
Patent number
9,899,242
Issue date
Feb 20, 2018
Varian Semiconductor Equipment Associates, Inc.
Jason M. Schaller
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Electrostatic chuck with LED heating
Patent number
9,728,430
Issue date
Aug 8, 2017
Varian Semiconductor Equipment Associates, Inc.
Jason M. Schaller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for heating and processing a substrate
Patent number
9,685,303
Issue date
Jun 20, 2017
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid thermal electrostatic clamp
Patent number
9,633,886
Issue date
Apr 25, 2017
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR CONTROLLING HEAT FLOW WITHIN A SILICON MELT
Publication number
20190338442
Publication date
Nov 7, 2019
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
APPARATUS FOR CONTROLLING HEAT FLOW WITHIN A SILICON MELT
Publication number
20190284715
Publication date
Sep 19, 2019
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
C30 - CRYSTAL GROWTH
Information
Patent Application
Semiconductor Workpiece Temperature Measurement System
Publication number
20190170591
Publication date
Jun 6, 2019
Varian Semiconductor Equipment Associates, Inc.
Klaus Petry
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR CRYSTALLINE SHEET GROWTH USING A COLD BLOCK A...
Publication number
20180047864
Publication date
Feb 15, 2018
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
C30 - CRYSTAL GROWTH
Information
Patent Application
Semiconductor Workpiece Temperature Measurement System
Publication number
20180003567
Publication date
Jan 4, 2018
Varian Semiconductor Equipment Associates, Inc.
Klaus Petry
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM FOR MEASURING MATERIAL THICKNESSES AT HIGH TEMPERATURES
Publication number
20170247810
Publication date
Aug 31, 2017
Varian Semiconductor Equipment Associates, Inc.
Peter L. Kellerman
C30 - CRYSTAL GROWTH
Information
Patent Application
Electrostatic Chuck With LED Heating
Publication number
20160379853
Publication date
Dec 29, 2016
Varian Semiconductor Equipment Associates, Inc.
Jason M. Schaller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Handling And Heating System
Publication number
20160329458
Publication date
Nov 10, 2016
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus For Heating And Processing A Substrate
Publication number
20160329190
Publication date
Nov 10, 2016
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Hybrid Thermal Electrostatic Clamp
Publication number
20160307786
Publication date
Oct 20, 2016
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device And Method For Substrate Heating During Transport
Publication number
20160293458
Publication date
Oct 6, 2016
Varian Semiconductor Equipment Associates, Inc.
Jason M. Schaller
F21 - LIGHTING