Alan C. Janos

Person

Darnestown, MD, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-situ absolute measurement process and apparatus for film thickne...
- Patent number 7,821,655
- Issue date Oct 26, 2010
- Axcelis Technologies, Inc.
- Alan Janos
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and process for treating dielectric materials
- Patent number 7,709,814
- Issue date May 4, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviol...
- Patent number 7,166,963
- Issue date Jan 23, 2007
- Axcelis Technologies, Inc.
- Alan Janos
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Apparatus and process for measuring light intensities
- Patent number 6,987,269
- Issue date Jan 17, 2006
- Axcelis Technologies, Inc.
- Alan C. Janos
- G11 - INFORMATION STORAGE
Information Patent Grant
Plasma process and apparatus
- Patent number 6,897,615
- Issue date May 24, 2005
- Axcelis Technologies, Inc.
- Alan C. Janos
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process for optically erasing charge buildup during fabrication of...
- Patent number 6,803,319
- Issue date Oct 12, 2004
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric barrier discharge apparatus and process for treating a s...
- Patent number 6,664,737
- Issue date Dec 16, 2003
- Axcelis Technologies, Inc.
- Ivan Berry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for optically erasing charge buildup during fabrication of...
- Patent number 6,605,484
- Issue date Aug 12, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable radiation source providing a VUV wavelength planar illumina...
- Patent number 6,597,003
- Issue date Jul 22, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow angle interference process and apparatus for determining re...
- Patent number 6,585,908
- Issue date Jul 1, 2003
- Axcelis Technologies, Inc.
- Andre G. Cardoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimized optical system design for endpoint detection
- Patent number 6,547,458
- Issue date Apr 15, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and process for treating dielectric materials
- Publication number 20060141806
- Publication date Jun 29, 2006
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-situ absolute measurement process and apparatus for film thickne...
- Publication number 20060082785
- Publication date Apr 20, 2006
- Alan Janos
- G01 - MEASURING TESTING
Information Patent Application
Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviol...
- Publication number 20060055300
- Publication date Mar 16, 2006
- Alan Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND PROCESS FOR MEASURING LIGHT INTENSITIES
- Publication number 20040113089
- Publication date Jun 17, 2004
- Axcelis Technologies, Inc.
- Alan C. Janos
- G01 - MEASURING TESTING
Information Patent Application
PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF...
- Publication number 20030180976
- Publication date Sep 25, 2003
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF...
- Publication number 20030104644
- Publication date Jun 5, 2003
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shallow angle interference process and apparatus for determining re...
- Publication number 20030062337
- Publication date Apr 3, 2003
- Andre G. Cardoso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tunable radiation source providing a VUV wavelength planar illumina...
- Publication number 20030015669
- Publication date Jan 23, 2003
- Axcelis Technologies, Inc.
- Alan C. Janos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma process and apparatus
- Publication number 20020135308
- Publication date Sep 26, 2002
- Alan C. Janos
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Alan C. Janos

Person

Patents Grantslast 30 patents

In-situ absolute measurement process and apparatus for film thickne...

Apparatus and process for treating dielectric materials

Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviol...

Apparatus and process for measuring light intensities

Plasma process and apparatus

Process for optically erasing charge buildup during fabrication of...

Dielectric barrier discharge apparatus and process for treating a s...

Process for optically erasing charge buildup during fabrication of...

Tunable radiation source providing a VUV wavelength planar illumina...

Shallow angle interference process and apparatus for determining re...

Optimized optical system design for endpoint detection

Patents Applicationslast 30 patents

Apparatus and process for treating dielectric materials

In-situ absolute measurement process and apparatus for film thickne...

Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviol...

APPARATUS AND PROCESS FOR MEASURING LIGHT INTENSITIES

PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF...

PROCESS FOR OPTICALLY ERASING CHARGE BUILDUP DURING FABRICATION OF...

Shallow angle interference process and apparatus for determining re...

Tunable radiation source providing a VUV wavelength planar illumina...

Plasma process and apparatus