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Alan CUTHBERTSON
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,180,069
Issue date
Dec 31, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
Patent number
12,139,397
Issue date
Nov 12, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,952,267
Issue date
Apr 9, 2024
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with dimple features and improved out-of-plane stiction
Patent number
11,919,769
Issue date
Mar 5, 2024
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS tab removal process
Patent number
11,905,170
Issue date
Feb 20, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with polysilicon and etch stop layer
Patent number
11,731,871
Issue date
Aug 22, 2023
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stiction reduction system and method thereof
Patent number
11,661,332
Issue date
May 30, 2023
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with topography
Patent number
11,618,674
Issue date
Apr 4, 2023
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with dimple features and improved out-of-plane stiction
Patent number
11,542,154
Issue date
Jan 3, 2023
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,267,699
Issue date
Mar 8, 2022
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with topography
Patent number
10,906,802
Issue date
Feb 2, 2021
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with topography
Patent number
10,745,270
Issue date
Aug 18, 2020
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
Publication number
20230202835
Publication date
Jun 29, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR WITH DIMPLE FEATURES AND IMPROVED OUT-OF-PLANE STICTION
Publication number
20230100960
Publication date
Mar 30, 2023
InvenSense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
Publication number
20230045563
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20230037849
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
Publication number
20230045257
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH POLYSILICON AND ETCH STOP LAYER
Publication number
20220380209
Publication date
Dec 1, 2022
InvenSense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR WITH DIMPLE FEATURES AND IMPROVED OUT-OF-PLANE STICTION
Publication number
20220298009
Publication date
Sep 22, 2022
InvenSense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS TAB REMOVAL PROCESS
Publication number
20220185662
Publication date
Jun 16, 2022
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
Publication number
20220144628
Publication date
May 12, 2022
InvenSense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
Publication number
20220106188
Publication date
Apr 7, 2022
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...
Publication number
20210107785
Publication date
Apr 15, 2021
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
Publication number
20200270123
Publication date
Aug 27, 2020
InvenSense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STICTION REDUCTION SYSTEM AND METHOD THEREOF
Publication number
20200262697
Publication date
Aug 20, 2020
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
Publication number
20200131033
Publication date
Apr 30, 2020
InvenSense, Inc.
Daesung LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
Publication number
20200131031
Publication date
Apr 30, 2020
InvenSense, Inc.
Daesung LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY