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Alan D. Rose
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Wylie, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for treating a workpiece with arrays of nozzles
Patent number
9,666,456
Issue date
May 30, 2017
Tel FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection of lost wafer from spinning chuck
Patent number
9,564,378
Issue date
Feb 7, 2017
Tel FSI, Inc.
Alan D. Rose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tools and methods for processing microelectronic workpieces using p...
Patent number
9,039,840
Issue date
May 26, 2015
Tel FSI, Inc.
Jeffrey M. Lauerhaas
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for treating a workpiece with arrays of nozzles
Patent number
8,978,675
Issue date
Mar 17, 2015
Tel FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
Patent number
8,967,167
Issue date
Mar 3, 2015
Tel FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
Patent number
8,899,248
Issue date
Dec 2, 2014
Tel FSI, Inc.
Jimmy D. Collins
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Tools and methods for processing microelectronic workpieces using p...
Patent number
8,684,015
Issue date
Apr 1, 2014
Tel FSI, Inc.
Jeffrey M. Lauerhaas
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method of removing liquid from a barrier structure
Patent number
8,668,778
Issue date
Mar 11, 2014
Tel FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
Patent number
8,656,936
Issue date
Feb 25, 2014
Tel FSI, Inc.
Jimmy D. Collins
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
Patent number
8,544,483
Issue date
Oct 1, 2013
Tel FSI, Inc.
Jimmy D. Collins
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Barrier structure and nozzle device for use in tools used to proces...
Patent number
8,387,635
Issue date
Mar 5, 2013
Tel FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tools and methods for processing microelectronic workpieces using p...
Patent number
8,235,062
Issue date
Aug 7, 2012
FSI International, Inc.
Jeffrey M. Lauerhaas
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Rinsing methodologies for barrier plate and venturi containment sys...
Patent number
7,913,706
Issue date
Mar 29, 2011
FSI International, Inc.
David DeKraker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact duct system incorporating moveable and nestable baffles for...
Patent number
7,681,581
Issue date
Mar 23, 2010
FSI International, Inc.
Alan D. Rose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for reducing etching erosion in a plasma conta...
Patent number
5,423,942
Issue date
Jun 13, 1995
Texas Instruments Incorporated
Roger A. Robbins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apertured ring for exhausting plasma reactor gases
Patent number
4,820,371
Issue date
Apr 11, 1989
Texas Instruments Incorporated
Alan D. Rose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas dispersion disk for use in plasma enhanced chemical vapor depos...
Patent number
4,792,378
Issue date
Dec 20, 1988
Texas Instruments Incorporated
Alan D. Rose
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
Publication number
20190337026
Publication date
Nov 7, 2019
TEL FSI, Inc.
Jeffery W. Butterbaugh
B08 - CLEANING
Information
Patent Application
RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING
Publication number
20180190517
Publication date
Jul 5, 2018
TEL FSI, Inc.
David DeKraker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Detection of Lost Wafer from Spinning Chuck
Publication number
20160172256
Publication date
Jun 16, 2016
TEL FSI, Inc.
Alan D. Rose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES
Publication number
20150170941
Publication date
Jun 18, 2015
TEL FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...
Publication number
20150075569
Publication date
Mar 19, 2015
TEL FSI, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
Publication number
20130213485
Publication date
Aug 22, 2013
TEL FSI, Inc.
Jeffrey M. Lauerhaas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR TREATING A WORKPIECE WITH ARRAYS OF NOZZLES
Publication number
20130037511
Publication date
Feb 14, 2013
FSI International, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE
Publication number
20130032172
Publication date
Feb 7, 2013
FSI International, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...
Publication number
20130032182
Publication date
Feb 7, 2013
FSI International, Inc.
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BARRIER STRUCTURE AND NOZZLE DEVICE FOR USE IN TOOLS USED TO PROCES...
Publication number
20110308647
Publication date
Dec 22, 2011
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Tools and methods for processing microelectronic workpieces using p...
Publication number
20090280235
Publication date
Nov 12, 2009
Jeffrey M. Lauerhaas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rinsing methodologies for barrier plate and venturi containment sys...
Publication number
20090038647
Publication date
Feb 12, 2009
David DeKraker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Barrier structure and nozzle device for use in tools used to proces...
Publication number
20080271763
Publication date
Nov 6, 2008
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Barrier structure and nozzle device for use in tools used to proces...
Publication number
20080008834
Publication date
Jan 10, 2008
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Barrier structure and nozzle device for use in tools used to proces...
Publication number
20070245954
Publication date
Oct 25, 2007
Jimmy D. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compact duct system incorporating moveable and nestable baffles for...
Publication number
20070022948
Publication date
Feb 1, 2007
Alan D. Rose
H01 - BASIC ELECTRIC ELEMENTS