Alan P. Sheng

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Gloucester, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for serial ion implanting productivity enhancements
- Patent number 7,019,315
- Issue date Mar 28, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Alan P. Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for multi-wafer scanning in ion implanters
- Patent number 6,995,381
- Issue date Feb 7, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Alan P. Sheng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Methods and apparatus for enabling multiple process steps on a sing...
- Publication number 20060258128
- Publication date Nov 16, 2006
- Peter Nunan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for multi-wafer scanning in ion implanters
- Publication number 20050121626
- Publication date Jun 9, 2005
- Varian Semiconductor Equipment Associates, Inc.
- Alan P. Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for serial ion implanting productivity enhancements
- Publication number 20050121627
- Publication date Jun 9, 2005
- Varian Semiconductor Equipment Associates, Inc.
- Alan P. Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scan methods and apparatus for ion implantation
- Publication number 20030122088
- Publication date Jul 3, 2003
- Varian Semiconductor Equipment Associates, Inc.
- Alan P. Sheng
- H01 - BASIC ELECTRIC ELEMENTS