Alan Stivers

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Translation generation for a mask pattern
- Patent number 7,171,637
- Issue date Jan 30, 2007
- Intel Corporation
- Alan R. Stivers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for producing electromagnetic radiation
- Patent number 7,154,109
- Issue date Dec 26, 2006
- Intel Corporation
- Alan R. Stivers
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of repairing an opaque defect on a mask with electron beam-i...
- Patent number 6,897,157
- Issue date May 24, 2005
- Intel Corporation
- Ted Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to inspect patterns with high resolution photoemission
- Patent number 6,774,990
- Issue date Aug 10, 2004
- Intel Corporation
- Ted Liang
- G01 - MEASURING TESTING
Information Patent Grant
Photolithographic mask fabrication
- Patent number 6,627,362
- Issue date Sep 30, 2003
- Intel Corporation
- Alan R. Stivers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for a reflective mask that is inspected at a f...
- Patent number 6,506,526
- Issue date Jan 14, 2003
- Intel Corporation
- Alan R. Stivers
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and apparatus for a reflective mask that is inspected at a f...
- Patent number 6,410,193
- Issue date Jun 25, 2002
- Intel Corporation
- Alan R. Stivers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Coatings on reflective mask substrates
- Patent number 6,352,803
- Issue date Mar 5, 2002
- The Regents of the University of California
- William Man-Wai Tong
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Translation generation for a mask pattern
- Publication number 20060190911
- Publication date Aug 24, 2006
- Intel Corporation
- Alan R. Stivers
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and apparatus for producing electromagnetic radiation
- Publication number 20060066197
- Publication date Mar 30, 2006
- Alan R. Stivers
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method to locally protect extreme ultraviolet multilayer blanks use...
- Publication number 20050109278
- Publication date May 26, 2005
- Ted Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mask repair with electron beam-induced chemical etching
- Publication number 20040048398
- Publication date Mar 11, 2004
- Ted Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method to inspect patterns with high resolution photoemission
- Publication number 20040036862
- Publication date Feb 26, 2004
- Ted Liang
- G01 - MEASURING TESTING
Information Patent Application
Photolithographic mask fabrication
- Publication number 20030082460
- Publication date May 1, 2003
- Alan R. Stivers
- B82 - NANO-TECHNOLOGY
Information Patent Application
Mask repair with electron beam-induced chemical etching
- Publication number 20030000921
- Publication date Jan 2, 2003
- Ted Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for a reflective mask that is inspected at a f...
- Publication number 20010051304
- Publication date Dec 13, 2001
- Alan R. Stivers
- B82 - NANO-TECHNOLOGY

Alan Stivers

Person

Patents Grantslast 30 patents

Translation generation for a mask pattern

Method and apparatus for producing electromagnetic radiation

Method of repairing an opaque defect on a mask with electron beam-i...

Method to inspect patterns with high resolution photoemission

Photolithographic mask fabrication

Method and apparatus for a reflective mask that is inspected at a f...

Method and apparatus for a reflective mask that is inspected at a f...

Coatings on reflective mask substrates

Patents Applicationslast 30 patents

Translation generation for a mask pattern

Method and apparatus for producing electromagnetic radiation

Method to locally protect extreme ultraviolet multilayer blanks use...

Mask repair with electron beam-induced chemical etching

Method to inspect patterns with high resolution photoemission

Photolithographic mask fabrication

Mask repair with electron beam-induced chemical etching

Method and apparatus for a reflective mask that is inspected at a f...