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Alasdair Dent
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San Jose, CA, US
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last 30 patents
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Patent Grant
Electrostatic chucks and methods for refurbishing same
Patent number
8,968,503
Issue date
Mar 3, 2015
Novellus Systems, Inc.
Alisa Hart
B32 - LAYERED PRODUCTS
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Patent Grant
Electrostatic chucks and methods for refurbishing same
Patent number
8,597,448
Issue date
Dec 3, 2013
Novellus Systems, Inc.
Alisa Hart
B32 - LAYERED PRODUCTS
Patents Applications
last 30 patents
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Patent Application
HYBRID 200 MM/300 MM SEMICONDUCTOR PROCESSING APPARATUSES
Publication number
20160358808
Publication date
Dec 8, 2016
LAM RESEARCH CORPORATION
Eric Russell Madsen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME
Publication number
20140124123
Publication date
May 8, 2014
Novellus Systems, Inc.
Alisa Hart
B32 - LAYERED PRODUCTS
Information
Patent Application
ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME
Publication number
20110155299
Publication date
Jun 30, 2011
Alisa Hart
B32 - LAYERED PRODUCTS