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Albert J. Lamm
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Hollister, CA, US
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last 30 patents
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Patent Grant
Apparatus for characterization of microelectronic feature quality
Patent number
6,642,063
Issue date
Nov 4, 2003
Lam Research Corporation
Randall S. Mundt
G01 - MEASURING TESTING
Information
Patent Grant
Method for characterization of microelectronic feature quality
Patent number
6,432,729
Issue date
Aug 13, 2002
Lam Research Corporation
Randall S. Mundt
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for control of deposit build-up on an inner surface of a...
Patent number
6,155,203
Issue date
Dec 5, 2000
Lam Research Corporation
William S. Kennedy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for control of deposit build-up on an inner su...
Patent number
6,035,868
Issue date
Mar 14, 2000
Lam Research Corporation
William S. Kennedy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for preventing lightup of gas distribution holes
Patent number
6,033,585
Issue date
Mar 7, 2000
Lam Research Corporation
Thomas E. Wicker
H01 - BASIC ELECTRIC ELEMENTS