Albert R. Ellingboe

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation helicon plasma source with magnetic dipoles
- Patent number 5,686,796
- Issue date Nov 11, 1997
- International Business Machines Corporation
- Roderick William Boswell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for contamination control in plasma processing
- Patent number 5,387,777
- Issue date Feb 7, 1995
- International Business Machines Corporation
- Reid S. Bennett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for contamination control in plasma processing
- Patent number 5,367,139
- Issue date Nov 22, 1994
- International Business Machines Corporation
- Reid S. Bennett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...