Albertus Adrianus Smits

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus having an encoder type position sensor system
- Patent number 8,836,913
- Issue date Sep 16, 2014
- ASML Netherlands B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having encoder type position sensor system
- Patent number 8,760,615
- Issue date Jun 24, 2014
- ASML Netherlands B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus having an encoder position sensor system
- Patent number 8,687,166
- Issue date Apr 1, 2014
- ASML Netherlands B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Apparatus Having an Encoder Type Position Sensor System
- Publication number 20120075613
- Publication date Mar 29, 2012
- ASML NETHERLANDS B.V.
- Peter Paul STEIJAERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus having encoder type position sensor system
- Publication number 20090002653
- Publication date Jan 1, 2009
- ASML NETHERLANDS B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus having encoder type position sensor system
- Publication number 20080291413
- Publication date Nov 27, 2008
- ASML NETHERLANDS B.V.
- Peter Paul Steijaert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY