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Albrecht Hof
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Aalen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for bearing a lithography mask
Patent number
9,964,862
Issue date
May 8, 2018
Carl Zeiss SMT GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system, in particular in a microlithographic projection exp...
Patent number
8,654,345
Issue date
Feb 18, 2014
Carl Zeiss SMT GmbH
Albrecht Hof
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a shape of an optical surface based on computat...
Patent number
8,593,642
Issue date
Nov 26, 2013
Carl Zeiss SMT GmbH
Rolf Freimann
G01 - MEASURING TESTING
Information
Patent Grant
Device and method for measuring lithography masks
Patent number
8,253,947
Issue date
Aug 28, 2012
Carl Zeiss SMS GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for sealing a projection exposure apparatus
Patent number
7,130,017
Issue date
Oct 31, 2006
Carl Zeiss SMT AG
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system with isolated measuring structure
Patent number
6,864,988
Issue date
Mar 8, 2005
Carl Zeiss Semiconductor Manufacturing Technologies AG
Albrecht Hof
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,750,949
Issue date
Jun 15, 2004
AMSL Netherlands B.V.
Erik Roelof Loopstra
G02 - OPTICS
Information
Patent Grant
Process for manufacturing optical surfaces and shaping machine for...
Patent number
6,523,443
Issue date
Feb 25, 2003
Carl-Zeiss-Stiftung, Heidenheim/Brenz
Albrecht Hof
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Spectacle lens with spherical front side and multifocal back side a...
Patent number
6,089,713
Issue date
Jul 18, 2000
Carl Zeiss Stiftung
Albrecht Hof
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Process and apparatus for the measurement of object topographies by...
Patent number
5,379,107
Issue date
Jan 3, 1995
Carl-Zeiss-Stiftung
Adalbert Hanssen
G01 - MEASURING TESTING
Information
Patent Grant
Method for analyzing periodic brightness patterns
Patent number
5,343,294
Issue date
Aug 30, 1994
Carl-Zeiss-Stiftung
Michael Kuchel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for three-dimensional optical measurement of o...
Patent number
5,307,151
Issue date
Apr 26, 1994
Carl-Zeiss-Stiftung
Albrecht Hof
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for non-contact measuring of object surfaces
Patent number
5,135,309
Issue date
Aug 4, 1992
Carl-Zeiss-Stiftung
Michael Kuchel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Coordinate measuring apparatus having an optical sensing head
Patent number
4,963,728
Issue date
Oct 16, 1990
Carl-Zeiss-Stiftung
Albrecht Hof
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR BEARING A LITHOGRAPHY MASK
Publication number
20170153555
Publication date
Jun 1, 2017
Carl Zeiss SMT GMBH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...
Publication number
20140078513
Publication date
Mar 20, 2014
Carl Zeiss SMT GMBH
Rolf FREIMANN
G02 - OPTICS
Information
Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...
Publication number
20120229814
Publication date
Sep 13, 2012
Carl Zeiss SMT GMBH
Rolf FREIMANN
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXP...
Publication number
20120140241
Publication date
Jun 7, 2012
Carl Zeiss SMT GMBH
Albrecht Hof
G01 - MEASURING TESTING
Information
Patent Application
DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
Publication number
20110205549
Publication date
Aug 25, 2011
Carl Zeiss SMS GmbH
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
Publication number
20100153059
Publication date
Jun 17, 2010
Gerd Klose
G01 - MEASURING TESTING
Information
Patent Application
Device for sealing a projection exposure apparatus
Publication number
20050206860
Publication date
Sep 22, 2005
Carl Zeiss SMT AG
Albrecht Hof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20030058422
Publication date
Mar 27, 2003
Erik Roelof Loopstra
G02 - OPTICS
Information
Patent Application
Optical system with a plurality of optical elements
Publication number
20030010902
Publication date
Jan 16, 2003
CARL-ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
Albrecht Hof
G02 - OPTICS