TREA

Albrecht Ullrich

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  • Dresden, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Shape metrology for photomasks
    • Patent number 9,405,185
    • Issue date Aug 2, 2016
    • Advanced Mask Technology Center GmbH & Co. KG
    • Clemens Utzny
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    SHAPE METROLOGY FOR PHOTOMASKS
    • Publication number 20150286130
    • Publication date Oct 8, 2015
    • Advanced Mask Technology Center GmbH & Co. KG
    • Clemens Utzney
    • G01 - MEASURING TESTING