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Aleksandar Owczarz
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method for chemical mechanical planarization
Patent number
7,033,250
Issue date
Apr 25, 2006
Lam Research Corporation
Yehiel Gotkis
B24 - GRINDING POLISHING
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Patent Grant
Method and apparatus for chemical mechanical planarization
Patent number
6,767,428
Issue date
Jul 27, 2004
Lam Research Corporation
Yehiel Gotkis
B24 - GRINDING POLISHING
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Patent Grant
Integrated planarization and clean wafer processing system
Patent number
6,676,493
Issue date
Jan 13, 2004
Lam Research Corporation
Aleksandar Owczarz
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Method for chemical mechanical planarization
Publication number
20040238493
Publication date
Dec 2, 2004
LAM RESEARCH CORPORATION
Yehiel Gotkis
B24 - GRINDING POLISHING