Aleksander Sergeevich Kovalev

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Moscow, RU

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus comprising an electrical discharge generator...
- Patent number 8,317,929
- Issue date Nov 27, 2012
- ASML Netherlands B.V.
- Tatyana Victorovna Rakhimova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic apparatus comprising an electrical discharge generator...
- Publication number 20070062557
- Publication date Mar 22, 2007
- ASML NETHERLANDS B.V.
- Tatyana Victorovna Rakhimova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY