Aleksandr Kabansky

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
- Patent number 6,333,268
- Issue date Dec 25, 2001
- Novellus Systems, Inc.
- Vladimir Starov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for removing post-etch residues and other adhe...
- Patent number 6,228,563
- Issue date May 8, 2001
- GaSonics International Corporation
- Vladimir Starov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY