Aleksey Petrenko

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuss...
- Patent number 9,068,952
- Issue date Jun 30, 2015
- KLA-Tencor Corporation
- Aleksey Petrenko
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring incident beam position in a wafer inspection system
- Patent number 8,934,091
- Issue date Jan 13, 2015
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Method for improving edge handling chuck aerodynamics
- Patent number 8,042,254
- Issue date Oct 25, 2011
- KLA-Tencor Corporation
- Alexander Belyaev
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and method to create haze standard
- Patent number 7,605,915
- Issue date Oct 20, 2009
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods and systems for determining a configur...
- Patent number 7,436,505
- Issue date Oct 14, 2008
- KLA-Tencor Technologies Corp.
- Alexander Belyaev
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Monitoring Incident Beam Position in a Wafer Inspection System
- Publication number 20140071437
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for producing and Measuring dynamically focuss...
- Publication number 20110051132
- Publication date Mar 3, 2011
- Aleksey Petrenko
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD TO CREATE HAZE STANDARD
- Publication number 20080245958
- Publication date Oct 9, 2008
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Computer-Implemented Methods and Systems for Determining a Configur...
- Publication number 20070229809
- Publication date Oct 4, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Alexander Belyaev
- G01 - MEASURING TESTING