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Alessandro POLO
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Delft, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Alignment system
Patent number
10,585,363
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Simon Gijsbert Josephus Mathijssen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus, method of measuring a structure and lithograph...
Patent number
10,101,675
Issue date
Oct 16, 2018
ASML Netherlands B.V.
Alessandro Polo
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Metrology Sensor, Lithographic Apparatus and Method for Manufacturi...
Publication number
20200103772
Publication date
Apr 2, 2020
ASML NETHERLANDS B.V.
Sebastianus Adrianus GOORDEN
G01 - MEASURING TESTING
Information
Patent Application
ALIGNMENT SYSTEM
Publication number
20180149987
Publication date
May 31, 2018
ASML NETHERLANDS B.V.
Simon Gijsbert Josephus MATHIJSSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus, Method of Measuring a Structure and Lithograph...
Publication number
20170255104
Publication date
Sep 7, 2017
ASML NETHERLANDS B.V.
Alessandro POLO
G01 - MEASURING TESTING