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Alex De Vries
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Meerlo, NL
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last 30 patents
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Patent Grant
Method of calibrating a lithographic apparatus, alignment method, c...
Patent number
7,253,884
Issue date
Aug 7, 2007
ASML Netherlands B.V.
Henricus Wilhelmus Maria Van Buel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method
Patent number
7,244,534
Issue date
Jul 17, 2007
ASML Netherlands B.V.
Alex De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and computer p...
Patent number
7,102,748
Issue date
Sep 5, 2006
ASML Netherlands B.V.
Alex De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic apparatus, device manufacturing method, and computer p...
Publication number
20050078291
Publication date
Apr 14, 2005
ASML NETHERLANDS B.V.
Alex De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of calibrating a lithographic apparatus, alignment method, c...
Publication number
20050018159
Publication date
Jan 27, 2005
ASML NETHERLANDS B.V.
Henricus Wilhelmus Maria Van Buel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY