Alex F. Fong

Person

  • San Jose, CA, US

Patents Applicationslast 30 patents

  • Information Patent Application

    Lithographic method

    • Publication number 20090207399
    • Publication date Aug 20, 2009
    • ASML NETHERLANDS B.V.
    • Alex F. Fong
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL