ALEX MINKOVICH

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer placement and gap control optimization through in situ feedback
- Patent number 10,196,741
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with switchable multizone heater
- Patent number 9,538,583
- Issue date Jan 3, 2017
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration-controlled substrate handling robots, systems, and methods
- Patent number 9,296,105
- Issue date Mar 29, 2016
- Applied Materials Inc.
- Nir Merry
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Methods and apparatus for processing substrates using model-based c...
- Patent number 8,880,210
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- Keith Brian Porthouse
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Position And Temperature Monitoring Of ALD Platen Susceptor
- Publication number 20160027675
- Publication date Jan 28, 2016
- Abraham Ravid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer Placement And Gap Control Optimization Through In Situ Feedback
- Publication number 20150376782
- Publication date Dec 31, 2015
- Kevin Griffin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH SWITCHABLE MULTIZONE HEATER
- Publication number 20140197151
- Publication date Jul 17, 2014
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION-CONTROLLED SUBSTRATE HANDLING ROBOTS, SYSTEMS, AND METHODS
- Publication number 20140156070
- Publication date Jun 5, 2014
- Nir Merry
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED C...
- Publication number 20130018500
- Publication date Jan 17, 2013
- Applied Materials, Inc.
- KEITH BRIAN PORTHOUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH HEATER AND RAPID TEMPERATURE CHANGE
- Publication number 20120196242
- Publication date Aug 2, 2012
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control scheme for cold wafer compensation on a lithography track
- Publication number 20070251939
- Publication date Nov 1, 2007
- Applied Materials, Inc.
- Alex Minkovich
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

ALEX MINKOVICH

Person

Patents Grantslast 30 patents

Wafer placement and gap control optimization through in situ feedback

Substrate support with switchable multizone heater

Vibration-controlled substrate handling robots, systems, and methods

Methods and apparatus for processing substrates using model-based c...

Patents Applicationslast 30 patents

Position And Temperature Monitoring Of ALD Platen Susceptor

Wafer Placement And Gap Control Optimization Through In Situ Feedback

SUBSTRATE SUPPORT WITH SWITCHABLE MULTIZONE HEATER

VIBRATION-CONTROLLED SUBSTRATE HANDLING ROBOTS, SYSTEMS, AND METHODS

METHODS AND APPARATUS FOR PROCESSING SUBSTRATES USING MODEL-BASED C...

SUBSTRATE SUPPORT WITH HEATER AND RAPID TEMPERATURE CHANGE

Control scheme for cold wafer compensation on a lithography track