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Alex Pokrovskiy
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San Jose, CA, US
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last 30 patents
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Patent Grant
Critical dimension uniformity monitoring for extreme ultra-violet r...
Patent number
10,288,415
Issue date
May 14, 2019
KLA-Tencor Corporation
Rui-fang Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Critical dimension uniformity monitoring for extreme ultraviolet re...
Patent number
9,863,761
Issue date
Jan 9, 2018
KLA-Tencor Corporation
Rui-fang Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
CRITICAL DIMENSION UNIFORMITY MONITORING FOR EXTREME ULTRA-VIOLET R...
Publication number
20180080759
Publication date
Mar 22, 2018
KLA-Tencor Corporation
Rui-fang Shi
G01 - MEASURING TESTING
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Patent Application
CRITICAL DIMENSION UNIFORMITY MONITORING FOR EXTREME ULTRAVIOLET RE...
Publication number
20150144798
Publication date
May 28, 2015
KLA-Tencor Corporation
Rui-fang Shi
G01 - MEASURING TESTING