Alex Rubinchik

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Heater temperature uniformity qualification tool
- Patent number 6,500,266
- Issue date Dec 31, 2002
- Applied Materials, Inc.
- Henry Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor for measuring a substrate temperature
- Patent number 6,406,179
- Issue date Jun 18, 2002
- Applied Materials, Inc.
- Bruce Adams
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for substrate temperature measurement using a reflecting...
- Patent number 6,183,130
- Issue date Feb 6, 2001
- Applied Materials, Inc.
- Bruce Adams
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Sensor for measuring a substrate temperature
- Publication number 20020139790
- Publication date Oct 3, 2002
- APPLIED MATERIALS, INC.
- Bruce Adams
- G01 - MEASURING TESTING
Information Patent Application
Sensor for measuring a substrate temperature
- Publication number 20010006530
- Publication date Jul 5, 2001
- APPLIED MATERIALS, INC.
- Bruce Adams
- G01 - MEASURING TESTING