Alex Siu Keung Chung

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Marlborough, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multilayered polishing pad, method for fabricating, and use thereof
- Patent number 6,383,066
- Issue date May 7, 2002
- International Business Machines Corporation
- Shyng-Tsong Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad grooving method and apparatus
- Patent number 6,340,325
- Issue date Jan 22, 2002
- International Business Machines Corporation
- Shyng-Tsong Chen
- B24 - GRINDING POLISHING