Alex Tsung-Liang Chen

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Danvers, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for carbon film deposition profile control
- Patent number 10,280,512
- Issue date May 7, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Alex Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CARBON FILM DEPOSITION PROFILE CONTROL
- Publication number 20170029950
- Publication date Feb 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Alex Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...