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Waalre, NL
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last 30 patents
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
8,330,941
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for positioning a target portion of a substrate with respect...
Patent number
7,889,357
Issue date
Feb 15, 2011
ASML Netherlands B.V.
Cornelis Henricus Van De Vin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for positioning a target portion of a substrate with respect...
Patent number
7,746,484
Issue date
Jun 29, 2010
ASML Netherlands B.V.
Cornelis Henricus Van De Vin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
7,684,011
Issue date
Mar 23, 2010
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, system, method, computer program, and appar...
Patent number
7,012,672
Issue date
Mar 14, 2006
ASML Netherlands B.V.
Tasja Van Rhee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...
Publication number
20110109889
Publication date
May 12, 2011
ASML NETHERLANDS B.V.
Cornelis Henricus VAN DE VIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR POSITIONING A TARGET PORTION OF A SUBSTRATE WITH RESPECT...
Publication number
20100245798
Publication date
Sep 30, 2010
ASML NETHERLANDS B.V.
Cornelis Henricus VAN DE VIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CALIBRATION METHOD FOR A LITHOGRAPHIC APPARATUS
Publication number
20100134778
Publication date
Jun 3, 2010
ASML NETHERLANDS B.V.
Carolus Johannes Catharina SCHOORMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Calibration method for a lithographic apparatus
Publication number
20080212055
Publication date
Sep 4, 2008
ASML NETHERLANDS B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, system, method, computer program, and appar...
Publication number
20040239905
Publication date
Dec 2, 2004
ASML NETHERLANDS B.V.
Tasja Van Rhee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY