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Ulm, DE
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last 30 patents
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Patent Grant
Workpiece processing apparatus with thermal processing systems
Patent number
12,183,558
Issue date
Dec 31, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support structure for thermal processing systems
Patent number
12,176,241
Issue date
Dec 24, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,837,447
Issue date
Dec 5, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20240055242
Publication date
Feb 15, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Gas Showerhead Assembly
Publication number
20220195601
Publication date
Jun 23, 2022
Mattson Technology, Inc.
Michael Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
Publication number
20220189747
Publication date
Jun 16, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20220187021
Publication date
Jun 16, 2022
Mattson Technology, Inc.
Manuel Sohn
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
Support Structure for Thermal Processing Systems
Publication number
20210272839
Publication date
Sep 2, 2021
Mattson Technology, Inc.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS