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Alex ZHENG
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Xuhui, CN
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last 30 patents
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Patent Grant
Reflective compact lens for magneto-optic Kerr effect metrology system
Patent number
12,164,093
Issue date
Dec 10, 2024
Alex Zheng
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
REFLECTIVE COMPACT LENS FOR MAGNETO-OPTIC KERR EFFECT METROLOGY SYSTEM
Publication number
20220137380
Publication date
May 5, 2022
KLA Corporation
Alex ZHENG
G02 - OPTICS