Alexander Buettner

Person

Weilburg, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for measurement of thick films and high aspect...
- Patent number 11,119,050
- Issue date Sep 14, 2021
- KLA Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor metrology based on hyperspectral imaging
- Patent number 10,801,953
- Issue date Oct 13, 2020
- KLA-Tencor Corporation
- David Y. Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measurement of thick films and high aspect...
- Patent number 10,690,602
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical metrology with small illumination spot size
- Patent number 10,648,796
- Issue date May 12, 2020
- KLA-Tencor Corporation
- Noam Sapiens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Simultaneous multi-angle spectroscopy
- Patent number 9,921,104
- Issue date Mar 20, 2018
- KLA-Tencor Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology with small illumination spot size
- Patent number 9,915,524
- Issue date Mar 13, 2018
- KLA-Tencor Corporation
- Noam Sapiens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for focusing an object plane and optical assembly
- Patent number 9,091,525
- Issue date Jul 28, 2015
- KLA-Tencor MIE GmbH
- Wolfgang Sulik
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for illuminating and inspecting a surface
- Patent number 7,561,263
- Issue date Jul 14, 2009
- Vistec Semiconductor Systems GmbH
- Lambert Danner
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POSITION MONITORING DEVICES
- Publication number 20240274401
- Publication date Aug 15, 2024
- KLA Corporation
- James Richard Bella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Measurement Of Thick Films And High Aspect...
- Publication number 20200284733
- Publication date Sep 10, 2020
- KLA Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Metrology Based On Hyperspectral Imaging
- Publication number 20200225151
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Measurement Of Thick Films And High Aspect...
- Publication number 20180238814
- Publication date Aug 23, 2018
- KLA-Tencor Corporation
- Noam Sapiens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Metrology With Small Illumination Spot Size
- Publication number 20180180406
- Publication date Jun 28, 2018
- KLA-Tencor Corporation
- Noam Sapiens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Simultaneous Multi-Angle Spectroscopy
- Publication number 20170356800
- Publication date Dec 14, 2017
- KLA-Tencor Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Application
Optical Metrology With Small Illumination Spot Size
- Publication number 20160334326
- Publication date Nov 17, 2016
- KLA-Tencor Corporation
- Noam Sapiens
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING THE POSITION OF DEFECTS ON OBJECT...
- Publication number 20150226539
- Publication date Aug 13, 2015
- KLA-Tencor Corporation
- Klaus-Dieter ROETH
- G01 - MEASURING TESTING
Information Patent Application
Method for focusing an object plane and optical assembly
- Publication number 20110205553
- Publication date Aug 25, 2011
- KLA-TENCOR MIE GMBH
- Wolfgang Sulik
- G02 - OPTICS
Information Patent Application
Device and method for scanning the whole surface of a wafer
- Publication number 20090034832
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20080144025
- Publication date Jun 19, 2008
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for wafer inspection
- Publication number 20080144014
- Publication date Jun 19, 2008
- Vistec Semiconductor Systems GmbH
- Wolfgang Vollrath
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for measuring the height profile of a structur...
- Publication number 20080031509
- Publication date Feb 7, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for illuminating and inspecting a surface
- Publication number 20070159700
- Publication date Jul 12, 2007
- Vistec Semiconductor Systems GmbH
- Lambart Danner
- G02 - OPTICS

Alexander Buettner

Person

Patents Grantslast 30 patents

Methods and systems for measurement of thick films and high aspect...

Semiconductor metrology based on hyperspectral imaging

Methods and systems for measurement of thick films and high aspect...

Optical metrology with small illumination spot size

Simultaneous multi-angle spectroscopy

Optical metrology with small illumination spot size

Method for focusing an object plane and optical assembly

Apparatus for illuminating and inspecting a surface

Patents Applicationslast 30 patents

SUBSTRATE POSITION MONITORING DEVICES

Methods And Systems For Measurement Of Thick Films And High Aspect...

Semiconductor Metrology Based On Hyperspectral Imaging

Methods And Systems For Measurement Of Thick Films And High Aspect...

Optical Metrology With Small Illumination Spot Size

Simultaneous Multi-Angle Spectroscopy

Optical Metrology With Small Illumination Spot Size

SYSTEM AND METHOD FOR DETERMINING THE POSITION OF DEFECTS ON OBJECT...

Method for focusing an object plane and optical assembly

Device and method for scanning the whole surface of a wafer

Apparatus for wafer inspection

Apparatus for wafer inspection

Apparatus and method for measuring the height profile of a structur...

Apparatus for illuminating and inspecting a surface