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last 30 patents
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Patent Grant
Method for correcting disturbances in a level sensor light path
Patent number
7,751,059
Issue date
Jul 6, 2010
ASML Netherlands B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
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Patent Grant
Method for correcting disturbances in a level sensor light path
Patent number
7,411,667
Issue date
Aug 12, 2008
ASML Netherlands B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Grant
Level sensor for lithographic apparatus
Patent number
7,265,364
Issue date
Sep 4, 2007
ASML Netherlands B.V.
Paulus Antonius Andreas Teunissen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY