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Alexander Hirnet
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Oberkochen, DE
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last 30 patents
Information
Patent Grant
Method of processing an optical element and an optical element, in...
Patent number
8,435,726
Issue date
May 7, 2013
Carl Zeiss SMT GmbH
Alexandra Pazidis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Monocrystalline optical component with curved surface and multilaye...
Patent number
7,489,441
Issue date
Feb 10, 2009
Carl Zeiss SMT AG
Harald Schink
G02 - OPTICS
Information
Patent Grant
Projection objective for immersion lithography
Patent number
7,460,206
Issue date
Dec 2, 2008
Carl Zeiss SMT AG
Karl-Stefan Weissenrieder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF PROCESSING AN OPTICAL ELEMENT AND AN OPTICAL ELEMENT, IN...
Publication number
20080309905
Publication date
Dec 18, 2008
Carl Zeiss SMT AG
Alexandra PAZIDIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
Publication number
20080297745
Publication date
Dec 4, 2008
Carl Zeiss SMT AG
Karl-Stefan WEISSENRIEDER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
Publication number
20080291419
Publication date
Nov 27, 2008
Carl Zeiss SMT AG
Karl-Stefan Weissenrieder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical component with a curved surface and a multilayer coating
Publication number
20050286827
Publication date
Dec 29, 2005
Carl Zeiss SMT AG
Patrick Scheible
G02 - OPTICS
Information
Patent Application
Projection objective for immersion lithography
Publication number
20050225737
Publication date
Oct 13, 2005
Carl Zeiss SMT AG
Karl-Stefan Weissenrieder
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY