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Alexander Kagan
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for controlling deposition of a charge on a waf...
Patent number
7,893,703
Issue date
Feb 22, 2011
KLA-Tencor Technologies Corp.
Jeffrey A. Rzepiela
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Systems and Methods for Controlling Deposition of a Charge on a Waf...
Publication number
20070069759
Publication date
Mar 29, 2007
KLA-TENCOR TECHNOLOGIES CORP.
Jeffrey A. Rzepiela
G01 - MEASURING TESTING