Alexander Ludwig KLEIN

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a membrane assembly
- Patent number 12,072,620
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Graphene pellicle lithographic apparatus
- Patent number 11,467,486
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Evgenia Kurganova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PELLICLES AND MEMBRANES FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20250013142
- Publication date Jan 9, 2025
- ASML NETHERLANDS B.V.
- Zomer Silvester HOUWELING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
- Publication number 20240411222
- Publication date Dec 12, 2024
- ASML NETHERLANDS B.V.
- Inci DONMEZ NOYAN
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20240369920
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH FORCE LOW VOLTAGE PIEZOELECTRIC MICROMIRROR ACTUATOR
- Publication number 20240012332
- Publication date Jan 11, 2024
- ASML NETHERLANDS B.V.
- Luc Roger Simonne HASPESLAGH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSI...
- Publication number 20240004184
- Publication date Jan 4, 2024
- ASML NETHERLANDS B.V.
- Luc Roger Simonne HASPESLAGH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
- Publication number 20230333462
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Ties Wouter VAN DER WOORD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
- Publication number 20230168577
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Zomer Silvester HOUWELING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
- Publication number 20230050613
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Ties Wouter VAN DER WOORD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20220213593
- Publication date Jul 7, 2022
- ASML NETHERLANDS B.V.
- Tamara DRUZHININA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20220035239
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GRAPHENE PELLICLE LITHOGRAPHIC APPARATUS
- Publication number 20200406244
- Publication date Dec 31, 2020
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Alexander Ludwig KLEIN

Person

Patents Grantslast 30 patents

Method of manufacturing a membrane assembly

Graphene pellicle lithographic apparatus

Patents Applicationslast 30 patents

PELLICLES AND MEMBRANES FOR USE IN A LITHOGRAPHIC APPARATUS

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY

HIGH FORCE LOW VOLTAGE PIEZOELECTRIC MICROMIRROR ACTUATOR

HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSI...

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

OPTICAL ELEMENT AND PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY

GRAPHENE PELLICLE LITHOGRAPHIC APPARATUS