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Alexander Mattheus
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Taufkirchen, DE
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last 30 patents
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Patent Grant
Apparatus for generating excited and/or ionized particles in a plas...
Patent number
7,665,416
Issue date
Feb 23, 2010
R3T GmbH Rapid Reactive Radicals Technology
Alexander Gschwandtner
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Method of producing a semiconductor surface covered with fluorine
Patent number
6,566,271
Issue date
May 20, 2003
Infineon Technologies AG
Alexander Gschwandtner
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Apparatus for generating excited and/or ionized particles in a plas...
Publication number
20060290301
Publication date
Dec 28, 2006
Alexander Gschwandtner
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR